Computations of the Flow and Heat Transfer in Microdevices Using DSMC With Implicit Boundary Conditions

The heat transfer and the fluid dynamics characteristics of subsonic gas flows through microchannels are examined using the direct simulation Monte Carlo (DSMC) method. A simple implicit treatment for the low-speed inflow and outflow boundaries for the DSMC of the flows in microelectromechanical systems (MEMS) is used. Micro-Couette flows and micro-Poiseuille flows are simulated with the value of the Knudsen numbers ranging between 0.06 and 0.72. Where appropriate, the calculated velocity slip and temperature distribution are compared with analytical solutions derived from the Navier-Stokes equations with slip-boundary conditions. A patterned microstructure with nonuniform surface temperature is also simulated

[1]  Edward S. Piekos,et al.  DSMC modeling of micromechanical devices , 1995 .

[2]  William W. Liou,et al.  Heat transfer in microchannel devices using DSMC , 2001 .

[3]  William W. Liou,et al.  Microfluid flow computations using a parallel DSMC code , 2002 .

[4]  Jing Fan,et al.  Statistical simulation of low-speed rarefied gas flows , 2001 .

[5]  Richard G. Wilmoth,et al.  Direct simulation Monte Carlo and Navier-Stokes simulations of blunt body wake flows , 1994 .

[6]  Michael S. Woronowicz,et al.  Application of direct simulation Monte Carlo to satellite contamination studies , 1995 .

[7]  Hongwei Sun, Mohammad Faghri.  EFFECTS OF RAREFACTION AND COMPRESSIBILITY OF GASEOUS FLOW IN MICROCHANNEL USING DSMC , 2000 .

[8]  William W. Liou,et al.  Implicit Boundary Conditions for Direct Simulation Monte Carlo Method in MEMS Flow Predictions , 2000 .

[9]  D. Whitfield.  Three-dimensional unsteady Euler equation solutions using flux vector splitting , 1983 .

[10]  M. Ivanov,et al.  Capsule aerodynamics with real gas effects from free-molecular to near-continuum regimes , 1997 .

[11]  Chang Shu,et al.  Prediction of micro-channel flows using direct simulation Monte Carlo , 2000 .

[12]  George Em Karniadakis,et al.  Rarefaction and Compressibility Effects in Gas Microflows , 1996 .

[13]  Mikhail Naumovich Kogan,et al.  Rarefied Gas Dynamics , 1969 .

[14]  Jay N. Zemel,et al.  Gas flow in micro-channels , 1995, Journal of Fluid Mechanics.

[15]  Hassan Hassan,et al.  Role of Boundary Conditions in Monte Carlo Simulation of MEMS Devices , 1997 .

[16]  E. Muntz,et al.  Rarefied Gas Dynamics , 1989 .

[17]  G. Bird.  Molecular Gas Dynamics and the Direct Simulation of Gas Flows , 1994 .

[18]  R. Nance,et al.  Role of Boundary Conditions in Monte Carlo Simulation of Microelectromechanical Systems , 1998 .

[19]  Jing Fan,et al.  Direct Simulation Methods for Low-Speed Microchannel Flows , 2000 .

[20]  B. Z. Cybyk,et al.  Direct Simulation Monte Carlo: Recent Advances and Applications , 1998 .