论文信息 - Lateral-field-excited thin-film Lamb wave resonator

Lateral-field-excited thin-film Lamb wave resonator

The basic principles and technology for the development of lateral-field-excited Lamb acoustic wave resonators on sputter-deposited c-oriented thin aluminum nitride films are presented. The experimental results demonstrate that Lamb waves can be successfully used as an alternative to high-velocity surface acoustic waves.

Ventsislav Yantchev | Ilia Katardjiev | Johan Bjurström

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