Thick SU8 microstructures prepared by broadband UV lithography and the applications in MEMS devices
暂无分享,去创建一个
[1] Bo Li,et al. Low-stress ultra-thick SU-8 UV photolithography process for MEMS , 2005 .
[3] Jun Zhang,et al. Effect of exposure dose on the replication fidelity and profile of very high aspect ratio microchannels in SU-8. , 2004, Lab on a chip.
[4] R. Puers,et al. Diffusing and swelling in SU-8: insight in material properties and processing , 2010 .
[5] Bingchu Cai,et al. Process research of high aspect ratio microstructure using SU-8 resist , 2004 .
[6] A. Peele,et al. Sidewall slopes and roughness of SU-8 HARMST , 2008 .
[7] C. Greiner,et al. SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography , 2007 .
[8] Yohannes M. Desta,et al. Ultra-deep x-ray lithography of densely packed SU-8 features: I. An SU-8 casting procedure to obtain uniform solvent content with accompanying experimental results , 2005 .
[9] A. Hawkins,et al. Optimized piranha etching process for SU8-based MEMS and MOEMS construction. , 2010, Journal of micromechanics and microengineering : structures, devices, and systems.
[10] TECHNICAL NOTE: The effects of adhesion energy on the fabrication of high-aspect-ratio SU-8 microstructures , 2010 .
[11] Yi Wang,et al. Investigation of SU8 as a structural material for fabricating passive millimeter-wave and terahertz components , 2015 .
[12] Uda Hashim,et al. Design and fabrication of micro-mixer with short turns angles for self-generated turbulent structures , 2016 .
[13] K. Lozano,et al. Thermophysical analysis of SU8‐modified microstructures created by visible light lithography , 2010 .
[14] Kevin D Belfield,et al. High-speed multiphoton absorption polymerization: fabrication of microfluidic channels with arbitrary cross-sections and high aspect ratios. , 2010, Lab on a chip.
[15] G. Jayanth,et al. Fabrication and Nonlinear Thermomechanical Analysis of SU8 Thermal Actuator , 2016, Journal of Microelectromechanical Systems.