Quantitative comparison of different preionization schemes of KrF laser discharges

* fluorescence radiation from the ion–ion recombination process in the gas volume during the preionization phase, therefore allowing spatial resolution by partial imaging of the volume. Volume-integrated and temporally resolved measurements are carried out to determine the average of absolute preionization densities by comparison with a theoretical model of the temporal behaviour of the recombination process. Spatially resolved measurements reveal the distribution of the preionization density. The preionization densities determined from spark and sliding/corona discharges schemes are considerably higher (ne0?1012 cm-3) than those obtained from pulsed X-ray preionization (ne0?107 cm-3).