Improved accuracy and speed in scanning probe microscopy by image reconstruction from non-gridded position sensor data.

Scanning probe microscopy (SPM) has facilitated many scientific discoveries utilizing its strengths of spatial resolution, non-destructive characterization and realistic in situ environments. However, accurate spatial data are required for quantitative applications but this is challenging for SPM especially when imaging at higher frame rates. We present a new operation mode for scanning probe microscopy that uses advanced image processing techniques to render accurate images based on position sensor data. This technique, which we call sensor inpainting, frees the scanner to no longer be at a specific location at a given time. This drastically reduces the engineering effort of position control and enables the use of scan waveforms that are better suited for the high inertia nanopositioners of SPM. While in raster scanning, typically only trace or retrace images are used for display, in Archimedean spiral scans 100% of the data can be displayed and at least a two-fold increase in temporal or spatial resolution is achieved. In the new mode, the grid size of the final generated image is an independent variable. Inpainting to a few times more pixels than the samples creates images that more accurately represent the ground truth.

[1]  G. L. Miller,et al.  A scanning tunneling microscope with a capacitance‐based position monitor , 1990 .

[2]  D. Carlton,et al.  Investigation of Defects and Errors in Nanomagnetic Logic Circuits , 2012, IEEE Transactions on Nanotechnology.

[3]  Guy Gilboa,et al.  Nonlocal Linear Image Regularization and Supervised Segmentation , 2007, Multiscale Model. Simul..

[4]  B. Eves,et al.  Self-consistent determination of line-width and probe shape using atomic force microscopy , 2013 .

[5]  Tony F. Chan,et al.  Euler's Elastica and Curvature-Based Inpainting , 2003, SIAM J. Appl. Math..

[6]  I. A. Mahmood,et al.  Fast spiral-scan atomic force microscopy , 2009, Nanotechnology.

[7]  Mohammed Dahleh,et al.  Feedback control of piezoelectric tube scanners , 1994, Proceedings of 1994 33rd IEEE Conference on Decision and Control.

[8]  Santosh Devasia,et al.  Feedback-Linearized Inverse Feedforward for Creep, Hysteresis, and Vibration Compensation in AFM Piezoactuators , 2007, IEEE Transactions on Control Systems Technology.

[9]  K. Knauss,et al.  A hydrothermal atomic force microscope for imaging in aqueous solution up to 150 °C , 1998 .

[10]  Jean-Michel Morel,et al.  A Review of Image Denoising Algorithms, with a New One , 2005, Multiscale Model. Simul..

[11]  Shao-Kang Hung,et al.  Spiral scanning method for atomic force microscopy. , 2010, Journal of nanoscience and nanotechnology.

[12]  Heinrich Rohrer,et al.  7 × 7 Reconstruction on Si(111) Resolved in Real Space , 1983 .

[13]  H. K. Wickramasinghe,et al.  Kelvin probe force microscopy , 1991 .

[14]  A. Stemmer,et al.  Force gradient sensitive detection in lift-mode Kelvin probe force microscopy , 2011, Nanotechnology.

[15]  Henning Stahlberg,et al.  Characterization of the motion of membrane proteins using high-speed atomic force microscopy. , 2012, Nature nanotechnology.

[16]  Yang Li,et al.  Feedforward control of a closed-loop piezoelectric translation stage for atomic force microscope. , 2007, The Review of scientific instruments.

[17]  Martin Burger,et al.  Inverse problems in imaging , 2013 .

[18]  G. Binnig,et al.  Tunneling through a controllable vacuum gap , 1982 .

[19]  Alexander Wong,et al.  A nonlocal-means approach to exemplar-based inpainting , 2008, 2008 15th IEEE International Conference on Image Processing.

[20]  T. Chan,et al.  WAVELET INPAINTING BY NONLOCAL TOTAL VARIATION , 2010 .

[21]  Joachim Weickert,et al.  Simultaneous Interpolation and Deconvolution Model for the 3-D Reconstruction of Cell Images , 2011, DAGM-Symposium.

[22]  Tony F. Chan,et al.  Mathematical Models for Local Nontexture Inpaintings , 2002, SIAM J. Appl. Math..

[23]  J. Gilman,et al.  Nanotechnology , 2001 .

[24]  權寧住,et al.  Mechatronics , 2019, CIRP Encyclopedia of Production Engineering.

[25]  C. Lieber,et al.  Ultra-sensitive imaging and interfacial analysis of patterned hydrophilic SAM surfaces using energy dissipation chemical force microscopy. , 2005, Journal of the American Chemical Society.

[26]  Charles M. Lieber,et al.  Chemical Force Microscopy , 1997, Microscopy and Microanalysis.

[27]  J. Lygeros,et al.  High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories , 2012, Nanotechnology.

[28]  Georg Schitter,et al.  Identification and open-loop tracking control of a piezoelectric tube scanner for high-speed scanning-probe microscopy , 2004, IEEE Transactions on Control Systems Technology.

[29]  Andrea L. Bertozzi,et al.  Analysis of a Two-Scale Cahn-Hilliard Model for Binary Image Inpainting , 2007, Multiscale Model. Simul..

[30]  Peter Liljeroth,et al.  Amplifying the Pacific Climate System Response to a Small 11-Year Solar Cycle Forcing , 2009, Science.

[31]  Theodore Antonakopoulos,et al.  Nanopositioning using the spiral of Archimedes: The probe-based storage case , 2010 .

[32]  I. A. Mahmood,et al.  Spiral scanning: An alternative to conventional raster scanning in high-speed scanning probe microscopes , 2010, Proceedings of the 2010 American Control Conference.