论文信息 - Room temperature thin film Ba/sub x/Sr/sub 1-x/TiO/sub 3/ Ku-band coupled microstrip phase shifters: effects of film thickness, doping, annealing and substrate choice

Room temperature thin film Ba/sub x/Sr/sub 1-x/TiO/sub 3/ Ku-band coupled microstrip phase shifters: effects of film thickness, doping, annealing and substrate choice

We report on measurements taken on thirteen Ku-band coupled microstrip phase shifters (CMPS) using thin ferroelectric films of Ba/sub x/Sr/sub 1-x/TiO/sub 3/. This CMPS design is a recent innovation designed to take advantage of the high tunability and tolerate the high dielectric constant of ferroelectric films at Ku- and K-band frequencies. These devices are envisioned as a component in low-cost steerable beam phased array antennas. Comparisons are made between devices with differing film thickness, annealed vs. unannealed, Mn-doped vs. undoped, and also substrates of LaAlO/sub 3/ and MgO.

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