论文信息 - A novel method for fabrication of a PLC platform for hybrid integration of an optical module by passive alignment

A novel method for fabrication of a PLC platform for hybrid integration of an optical module by passive alignment

A novel fabrication method and structure of a planar lightwave circuit (PLC) platform for hybrid integration of an optical module by passive alignment technology is presented. Precise formation of V-grooves in the PLC platform can be easily obtained by the proposed process. The passive alignments of optical elements, including optical fiber, are achieved in one-mask. LD modules were implemented by the proposed method.

Ki-Tae Jeong | Soo-Jin Park | Hee-Kyung Sung | Sang-Ho Park

[1] M. Fishteyn,et al. Hybrid integrated silicon optical bench planar lightguide circuits , 1998, 1998 Proceedings. 48th Electronic Components and Technology Conference (Cat. No.98CH36206).

[2] P. Vettiger,et al. Passive self-aligned low-cost packaging of semiconductor laser arrays on Si motherboard , 1995, IEEE Photonics Technology Letters.

[3] Toshikazu Hashimoto,et al. Application of planar lightwave circuit platform to hybrid integrated optical WDM transmitter/receiver module , 1995 .

[4] Kenichi Iga,et al. Micro-optical bench for alignment-free optical coupling. , 1999 .

[5] Masao Kawachi,et al. Silica-based optical waveguide on terraced silicon substrate as hybrid integration platform , 1993 .