Polydimethylsiloxane optical microring resonator by nano-imprint lithography on MgF2 substrate

A new type of polydimethylsiloxane (PDMS) optical microring resonator on MgF2 substrate is proposed and fabricated by nano-imprint lithography. The measured quality factors of the resonators were in the order of 104 in the C band. Our work provides a new method for fabrication of on-chip whispering gallery mode resonators, which can benefit the applications in communication and sensing fields.

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