Toward Atomic-Scale Device Fabrication in Silicon Using Scanning Probe Microscopy
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Michelle Y. Simmons | L. Oberbeck | Neil J. Curson | Alex R. Hamilton | S. R. Schofield | L. Oberbeck | M. Simmons | K. Goh | T. Hallam | N. Curson | R. G. Clark | A. Hamilton | Toby Hallam | Robert G. Clark | Kuan Eng Johnson Goh | Steven R. Schofield | F. J. Ruess | F. Rueß