Influence of ion assistance on optical properties, residual stress and laser induced damage threshold of HfO2 thin film by use of different ion sources
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Fei Zhang | Jian Wang | Jing Luo | Zheng Wang | Qian Wu | Mincai Liu | Feng Pan | Yaowei Wei | Zhichao Liu | Shugang Li | Z. Wang | Zhichao Liu | Yaowei Wei | Jian Wang | Mincai Liu | F. Pan | Qiangjun Wu | Jing Luo | Fei Zhang | Shugang Li
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