论文信息 - Ion current analysis in pulsed RF plasma as a fundamental research of plasma-based ion implantation - 字舞流文

Ion current analysis in pulsed RF plasma as a fundamental research of plasma-based ion implantation

K. Yukimura | S. Masamune | N. Tenno

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[2] N. Cheung,et al. Analytical modeling of plasma immersion ion implantation target current using the SPICE circuit simulator , 1994 .