This paper proposes an innovated method to integrate an active RFID tag with a thermal bubble accelerometer on a flexible substrate, thus it can become a wireless acceleration sensor for easy usage. In this paper a semi-cylindrical chamber filled with Xe (xenon) gas is proposed to replace the original rectangular with CO2. Comparing the response times (32G) are also made; we note the response time with Xe gas is about 51.6% of CO2. On the other hand, comparisons of sensitivity and response time are also made with semi-cylindrical chamber; note the sensitivity with CO2 is better at lower G's, but the performances are degraded above 18G and even lower than with Xe above 28G. We see the response times (32G) with Xe is about 20.2% of CO2. Besides, the response speed is doubled with Xe by using semi-cylindrical chamber instead of the rectangular one.
[1]
Pasqualina M. Sarro,et al.
Temperature dependence and drift of a thermal accelerometer
,
1998
.
[2]
Mona E. Zaghloul,et al.
Micromachined convective accelerometers in standard integrated circuits technology
,
2000
.
[3]
Rongshun Chen,et al.
A novel thermal-bubble-based micromachined accelerometer
,
2005,
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..
[4]
Alain Giani,et al.
Studies and optimization of the frequency response of a micromachined thermal accelerometer
,
2008
.