论文信息 - Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask - 字舞流文

Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask

S. Niemcharoen | N. Atthi | W. Jeamsaksiri | Kathirgamasundaram Sooriakumar | Jirawat Jantawong | C. Leepattarapongpan | A. Srisuwan | Anu Austin