论文信息 - Rotational feedthrough using ultrasonic motor for high vacuum condition - 字舞流文

Rotational feedthrough using ultrasonic motor for high vacuum condition

Toshiki Niino | Hajime Asama | Takeshi Morita | H. Asama | T. Morita | T. Niino

[1] Takaaki Ishii,et al. Characteristics of Ultrasonic Motors Driven in a Vacuum , 1998 .

[2] S. Ueha,et al. Electrical Equivalent Circuit of Loaded Thick Langevin Flexural Transducer , 1997 .

[3] S. Ueha,et al. Ultrasonic motors : theory and applications , 1993 .