Technical Note Optimization of inlet concentration profile for uniform deposition in a cylindrical chemical vapor deposition chamber
暂无分享，去创建一个
[1] C. Rhie,et al. Numerical Study of the Turbulent Flow Past an Airfoil with Trailing Edge Separation , 1983 .
[2] M. Peric. A finite volume method for the prediction of three-dimensional fluid flow in complex ducts , 1985 .
[3] R. Greif,et al. A Numerical Model of the Flow and Heat Transfer in a Rotating Disk Chemical Vapor Deposition Reactor , 1987 .
[4] Christine A. Wang,et al. Hydrodynamic dispersion in rotating-disk omvpe reactors: Numerical simulation and experimental measurements , 1989 .
[5] D. Fotiadis,et al. Transport phenomena in vertical reactors for metalorganic vapor phase epitaxy: I. Effects of heat transfer characteristics, reactor geometry, and operating conditions , 1990 .
[6] D. Fotiadis,et al. Flow Phenomena in Chemical Vapor Deposition of Thin Films , 1991 .
[7] R. Greif,et al. Mixed binary convection in a rotating disk chemical vapor deposition reactor , 1997 .
[8] Garret N. Vanderplaats,et al. Numerical optimization techniques for engineering design , 1999 .
[9] S. Patankar. Numerical Heat Transfer and Fluid Flow , 2018, Lecture Notes in Mechanical Engineering.