Fabrication of robust PbLa(Zr,Ti)O >3 capacitor structures using insulating oxide encapsulation layers for FeRAM integration
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A. Oshima | K. Kondo | T. Yoshimura | N. Fujimura | Y. Hirota | N. Okamoto | Takeyasu Saito | A. Kitajima | K. Izumi | T. Tsuji