Estimation method for errors of an aerostatic planar XY stage based on measured profiles errors

This paper describes a method for estimating the geometric errors of an aerostatic planar XY stage. The method calculates two-dimensional (2D) position errors and flatness based on measured guideway profiles. Profile measurements, estimates of motion error, and geometric error models are considered to estimate the 2D position and flatness errors along the X- and Y-axes. A three-probe system is used to measure the guideway profiles for the X- and Y-axes. The motion errors, which are used as input data for geometric error models, are calculated from the force equilibrium of aerostatic bearings along the measured guideway profiles and compared with laser interferometer measurements. Geometric error models were derived to calculate the 2D position and flatness errors of the stage. The measured results and estimates for the 2D position error and flatness differed by 0.5 and 0.6 μm, respectively. Therefore, the proposed estimation method for 2D position and flatness errors of an aerostatic planar XY stage will be a useful tool during the machining and assembly of guideways.

[1]  Wei Gao,et al.  Profile measurement of machined surface with a new differential method , 1994 .

[2]  H. Tanaka,et al.  Extensive Analysis and Development of Straightness Measurement by Sequential-Two-Points Method , 1986 .

[3]  Anthony Chukwujekwu Okafor,et al.  Derivation of machine tool error models and error compensation procedure for three axes vertical machining center using rigid body kinematics , 2000 .

[4]  Chana Raksiri,et al.  Geometric and force errors compensation in a 3-axis CNC milling machine , 2004 .

[5]  Shuichi Dejima,et al.  Precision positioning of a five degree-of-freedom planar motion stage , 2005 .

[6]  W. T. Estler.  Calibration And Use Of Optical Straightedges In The Metrology Of Precision Machines , 1985 .

[7]  Masanori Ohori,et al.  A New Method for the Measurement of the Straightness of Machine Tools and Machined Work , 1982 .

[8]  Masanori Ohori,et al.  Application of a New Straightness Measurement Method to Large Machine Tool , 1981 .

[9]  Robert J. Hocken,et al.  Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute Testing’ , 1996 .

[10]  T S Giam,et al.  Precision coordinated control of multi-axis gantry stages. , 2007, ISA transactions.

[11]  Wei Gao,et al.  High accuracy profile measurement of a machined surface by the combined method , 1996 .

[12]  G Makosch,et al.  Surface profile measurement with a scanning differential ac interferometer. , 1984, Applied optics.

[13]  David L. Trumper,et al.  Linear Motor-Leviated Stage for Photolithography , 1997 .

[14]  Seung-Woo Kim,et al.  An ultraprecision stage for alignment of wafers in advanced microlithography , 1997 .

[15]  A. Slocum,et al.  Precision Machine Design , 1992 .

[16]  Wei Gao,et al.  A three-probe system for measuring the parallelism and straightness of a pair of rails for ultra-precision guideways , 2007 .

[17]  Chun-Hong Park,et al.  Estimation and correction method for the two-dimensional positionerrors of a planar XY stage based on motion error measurements , 2006 .