Experimental demonstration and analysis of high performance and low 1/f noise Tri-gate MOSFETs by optimizing device structure

In this paper, we experimentally investigate the performance of multi-gate MOSFETs (MUGFETs) using the advanced radical gate oxide and the accumulation-mode (AM) FD-SOI MOSFETs. Firstly, we experimentally demonstrate that the drain current in AM multi-gate MOSFET is improved about 1.3 times compared with conventional inversion-mode (IM) MOSFETs with the same gate oxide. Secondly, we indicate that 1/f noise levels in AM MUGFETs are obviously suppressed compared with the conventional IM MUGFETs. The advantages resulted from the AM device structure for MUGFETs are demonstrated in this experiment.