Characterization and optimization of a laser-produced x-ray source with a double-stream gas puff target

Characterization measurements of a laser-produced x-ray source based on a double-stream ga puff target are presented. The target was irradiated with a Nd:glass laser producing 1 ns pulses with energy up to 10 J. Production in the wavelength range up to 200 nm have been measured form xenon, krypton, argon, and nitrogen targets using the transmission grating spectrometer with the back-illuminated CCD and the absolutely calibrated silicon photodiodes. Spectral characteristics of x-ray and EUV emissions are presented.