32×32 strictly non-blocking Si-wire optical switch on ultra-small die of 11×25 mm2

We demonstrate an ultra-compact 32 × 32 path-independent-insertion-loss optical switch that integrates 1024 thermooptic MZ switches on SOI platform using ArF immersion lithography. On-chip loss of 19.7 dB and estimated crosstalk of -20 dB are achieved.