MEMS in Automobiles

This chapter provides an overview of microelectromechanical system (MEMS)-based commercial products. It also discusses the basic MEMS technologies, including IC technology, MEMSCAD (MEMS computer added design), micromachining, materials, and packaging and testing. The emphasis is on the compatibility issues of the various micromachining and packaging technologies with the special requirements of automotive applications. The fabrication, application, and evolution of the silicon membrane-based pressure transducers, silicon-based micro-accelerometers, and solid-state gyroscopes are described. A variety of driver vision assistance devices, the potential high-volume automotive products, are presented. The paper is concluded with a remark on the upcoming systems that are able to make automobile safer, more fuel efficient, and fun to drive.

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