Electroless plating of nickel on silicon for fabrication of high-aspect-ratio microstructures

[1]  A. B. Frazier,et al.  High aspect ratio electroplated microstructures using a photosensitive polyimide process , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[2]  T. Christenson,et al.  Fabrication of assembled micromechanical components via deep X-ray lithography , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[3]  Wolfgang Riedel,et al.  ELECTROLESS NICKEL PLATING , 2007 .

[4]  L. Crawforth,et al.  Batch-fabricated milli-actuators , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[5]  M. Mehregany,et al.  High-aspect-ratio photolithography for MEMS applications , 1995 .

[6]  C. E. Baumgartner Adhesion of electrolessly deposited nickel on lead zirconate titanate ceramic , 1989 .

[7]  Miles V. Sullivan,et al.  Electroless Nickel Plating for Making Ohmic Contacts to Silicon , 1957 .

[8]  J. Lue The fabrication of Schottky-barrier solar cells by electroless nickel plating , 1979 .

[9]  J. Bernstein,et al.  A micromachined comb-drive tuning fork rate gyroscope , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[10]  渋谷 智徳,et al.  シリコンウェハ-上への無電解めっきの密着性 (膜の密着性特集号) , 1986 .

[11]  Sorab K. Ghandhi,et al.  VLSI fabrication principles , 1983 .

[12]  Bumkyoo Choi,et al.  Deep X-ray and UV lithographies for micromechanics , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[13]  Jurgen Mohr,et al.  Fabrication of capacitive acceleration sensors by the LIGA technique , 1991 .

[14]  J. Lee,et al.  Growth, structure and electrical characteristics of epitaxial nickel silicide from chemically electroless Ni deposition on Si , 1990 .

[15]  C. Ting,et al.  Selective Electroless Metal Deposition for Integrated Circuit Fabrication , 1989 .

[16]  H. Reichl,et al.  Fabrication of high depth-to-width aspect ratio microstructures , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[17]  Nickel surface micromachining , 1995, MHS'95. Proceedings of the Sixth International Symposium on Micro Machine and Human Science.