论文信息 - MEMS Piezoelectric Vibration Energy Harvester with In-Plane PZT Bimorph

MEMS Piezoelectric Vibration Energy Harvester with In-Plane PZT Bimorph

In order to overcome the drawbacks of conventional-plane vibration MEMS-PVEH. We have presented an in-plane vibration MEMS-PVEH with bimorph PZT by bonding bulk PZT. Performance of two kinds of PVEHs were studied by finite element method using COMSOL software. Including vibration modes, resonant frequencies, open circuit voltage, peak power, optimal resistance, and the static stress at gravity load of the structure. Compare to the conventional-plane vibration PVEH, the proposed in-plane vibration PVEH has lower resonant frequency of 122 Hz, higher peak power of 50 μW. It has advantages of heavier proof mass, good performance PZT bimorph, thinner cantilever thickness, convenient electrodes lead, and has the frame to protect the oscillator. Besides, in-plane vibration PVEH is convenient to be fabricated by planar graphical MEMS process.

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