Fabrication of patterned arrays with alternating regions of aluminum and porous aluminum oxide

Fabrication of patterned anodic aluminum oxide arrays using a dense layer of barrier aluminum oxide as the anodization mask is described. This fabrication process includes patterning of the aluminum film with a photoresist and brief anodization at a high voltage. The photoresist is then removed and the aluminum film is again anodized at a low voltage to grow porous aluminum oxide. Using this procedure, we are able to fabricate anodic aluminum oxide arrays on silicon wafers consisting of alternating regions of porous aluminum oxide and aluminum metal perpendicular to the silicon substrate.

[1]  P. Atanassov,et al.  Dynamics and temperature dependence of etching processes of porous and barrier aluminum oxide layers , 2004 .

[2]  P. Atanassov,et al.  Patterning of Nanoporous Anodic Aluminum Oxide Arrays by Using Sol−Gel Processing, Photolithography, and Plasma Etching , 2004 .

[3]  Dmitri A. Brevnov,et al.  Growth of Patterned Nanopore Arrays of Anodic Aluminum Oxide , 2003 .

[4]  Shoso Shingubara,et al.  Fabrication of Nanomaterials Using Porous Alumina Templates , 2003 .

[5]  T. Tamamura,et al.  Ordered Mosaic Nanocomposites in Anodic Porous Alumina , 2003 .

[6]  C. R. Martin,et al.  Smart nanotubes for bioseparations and biocatalysis. , 2002, Journal of the American Chemical Society.

[7]  Nam-Trung Nguyen,et al.  MEMS-Micropumps: A Review , 2002 .

[8]  Wonbong Choi,et al.  Selective Growth of Carbon Nanotubes on Pre-patterned Porous Anodic Aluminum Oxide , 2002 .

[9]  Ralf B. Wehrspohn,et al.  Hexagonally ordered 100 nm period nickel nanowire arrays , 2001 .

[10]  S. Lazarouk,et al.  Reliability of built in aluminum interconnection with low-ε dielectric based on porous anodic alumina , 2000 .

[11]  Frank Müller,et al.  Self-organized formation of hexagonal pore arrays in anodic alumina , 1998 .

[12]  Martin Moskovits,et al.  Nonlithographic nano-wire arrays: fabrication, physics, and device applications , 1996 .

[13]  F. Keller,et al.  Structural Features of Oxide Coatings on Aluminum , 1953 .

[14]  D. Beebe,et al.  Physics and applications of microfluidics in biology. , 2002, Annual review of biomedical engineering.

[15]  M. L. Reed,et al.  Submicron Patterned Anodic Oxidation of Aluminum Thin Films , 2000 .