Far-field spatially angle-resolved scattering measurements: practical way to recover surface topography

Abstract. Angle-resolved scattering techniques are currently used to extract the second-order statistical moments (roughness spectra or autocorrelation function) of surface topography, but have not allowed the recovery of the surface topography itself. We show how we could solve this point with an original setup based on spatially resolved measurements. Hence, the technique provides a breakthrough in light-scattering characterization.

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