论文信息 - Ohmic contact properties of magnetron sputtered Ti3SiC2 on n- and p-type 4H-silicon carbide - 字舞流文

Ohmic contact properties of magnetron sputtered Ti3SiC2 on n- and p-type 4H-silicon carbide

A. Spetz | C. Zetterling | L. Hultman | M. Domeij | P. Eklund | Jun Lu | R. Ghandi | K. Buchholt