High quality and uniformity GaN grown on 150 mm Si substrate using in-situ NH 3 pulse flow cleaning process
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B. Shen | Xuelin Yang | Xinqiang Wang | Yuxia Feng | Anqi Hu | Chunyan Song | Pan Yaobo | Shan Wu | Jianfei Shen | P. Ji | Jie Zhang | Jianpeng Cheng | Tang Jun | Tao Chun