Tracking Control of PZT-Driven Compliant Precision Positioning Micromanipulator

This paper focuses on improving tracking performance of totally uncoupled compliant micromanipulator based on robust control method of elliptical hysteresis model. The hysteresis model and hysteresis compensation model for proposed mechanism based on Piezoelectric transducer (PZT) are established by using elliptical model method. The values of elliptical hysteresis model parameters are identified by simulating method with different frequencies of control input. The uncertainty model is also established, the values of corresponding estimated parameters are conformed by experiment method. Based on the uncertainty model and elliptical hysteresis model, the robust tracking control method is presented and utilized to evaluate the tracking performance of proposed mechanism under inputting different tracking curves. The proposed method can accurately control the output displacement and improve tracking performance of this mechanism, which are validated and carried out by using experimental studies. Additionally, the coupling errors between two directions are kept within 0.14% and the tracking errors for different curves are within 2.5%.

[1]  Chih-Jer Lin,et al.  Particle swarm optimization based feedforward controller for a XY PZT positioning stage , 2012 .

[2]  Bijan Shirinzadeh,et al.  Experimental Investigation of Robust Motion Tracking Control for a 2-DOF Flexure-Based Mechanism , 2014, IEEE/ASME Transactions on Mechatronics.

[3]  Larry L. Howell,et al.  A Loop-Closure Theory for the Analysis and Synthesis of Compliant Mechanisms , 1996 .

[4]  Wei Tech Ang,et al.  Feedforward Controller With Inverse Rate-Dependent Model for Piezoelectric Actuators in Trajectory-Tracking Applications , 2007, IEEE/ASME Transactions on Mechatronics.

[5]  Pengbo Liu,et al.  Modeling and control of a novel X-Y parallel piezoelectric-actuator driven nanopositioner , 2014, 2014 American Control Conference.

[6]  Placid Mathew Ferreira,et al.  Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematics XY stage , 2007 .

[7]  Seung-Bok Choi,et al.  A magnification device for precision mechanisms featuring piezoactuators and flexure hinges: Design and experimental validation , 2007 .

[8]  Wei Wei,et al.  An Incremental Feedback Control for Uncertain Mechanical System , 2020, IEEE Access.

[9]  Jingyan Dong,et al.  Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-/Nanomanufacturing , 2011, IEEE/ASME Transactions on Mechatronics.

[10]  Yuan Li,et al.  An Experimental Study on the Dynamics of a 3-RRR Flexible Parallel Robot , 2011, IEEE Transactions on Robotics.

[11]  Yangmin Li,et al.  A New Flexure-Based $Y\theta$ Nanomanipulator With Nanometer-Scale Resolution and Millimeter-Scale Workspace , 2015, IEEE/ASME Transactions on Mechatronics.

[12]  Tien-Fu Lu,et al.  A three-DOF compliant micromotion stage with flexure hinges , 2004, Ind. Robot.

[13]  Michael Goldfarb,et al.  Position control of a compliant mechanism based micromanipulator , 1999, Proceedings 1999 IEEE International Conference on Robotics and Automation (Cat. No.99CH36288C).

[14]  Yangmin Li,et al.  Optimal Design and Control Strategy of a Novel 2-DOF Micromanipulator , 2013 .

[15]  R. Ben Mrad,et al.  A model for voltage-to-displacement dynamics in piezoceramic actuators subject to dynamic-voltage excitations , 2002 .

[16]  Tien-Fu Lu,et al.  Position control of a 3 DOF compliant micro-motion stage , 2004, ICARCV 2004 8th Control, Automation, Robotics and Vision Conference, 2004..

[17]  Yangmin Li,et al.  Design, analysis and simulation of a novel 3-DOF translational micromanipulator based on the PRB model , 2016 .

[18]  Dawei Zhang,et al.  Design issues in a decoupled XY stage: Static and dynamics modeling, hysteresis compensation, and tracking control , 2013 .

[19]  Yanling Tian,et al.  A flexure-based mechanism and control methodology for ultra-precision turning operation , 2009 .

[20]  Yonghong Tan,et al.  Modeling hysteresis using hybrid method of continuous transformation and neural networks , 2005 .

[21]  I. Her,et al.  A Linear Scheme for the Displacement Analysis of Micropositioning Stages with Flexure Hinges , 1994 .

[22]  Yonghong Tan,et al.  An inner product-based dynamic neural network hysteresis model for piezoceramic actuators , 2005 .

[23]  Bijan Shirinzadeh,et al.  Robust motion tracking control of piezo-driven flexure-based four-bar mechanism for micro/nano manipulation , 2008 .

[24]  Yangmin Li,et al.  Design, Analysis, and Test of a Novel 2-DOF Nanopositioning System Driven by Dual Mode , 2013, IEEE Transactions on Robotics.

[25]  H.J. Shieh,et al.  Adaptive Tracking Control of a Piezoelectric Micropositioner , 2006, 2006 1ST IEEE Conference on Industrial Electronics and Applications.

[26]  Yuen Kuan Yong,et al.  Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning , 2009, IEEE Transactions on Nanotechnology.

[27]  Yangmin Li,et al.  Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation , 2018, Mechanical Sciences.

[28]  Hwee Choo Liaw,et al.  Neural Network Motion Tracking Control of Piezo-Actuated Flexure-Based Mechanisms for Micro-/Nanomanipulation , 2009, IEEE/ASME Transactions on Mechatronics.

[29]  Wei Zhao,et al.  The constant-Jacobian method for kinematics of a three-DOF planar micro-motion stage , 2002, J. Field Robotics.

[30]  Shaocheng Tong,et al.  Observed-Based Adaptive Fuzzy Decentralized Tracking Control for Switched Uncertain Nonlinear Large-Scale Systems With Dead Zones , 2016, IEEE Transactions on Systems, Man, and Cybernetics: Systems.

[31]  Placid Mathew Ferreira,et al.  Design analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage , 2007 .