Electrostatic energy scavengers for wireless autonomous transducer solutions

Autonomous devices such as wireless sensor nodes within sensor networks need a long life time; current battery solutions are not sufficient for these devices. A generator that extracts energy from the ambient would be a promising power supply for these sensor systems. This paper describes aMEMS-based energy scavenger that converts mechanical vibrations into electrical power by means of a variable capacitor.

[1]  H. Tilmans.  Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems , 1996 .

[2]  C. Van Hoof,et al.  Thermoelectric MEMS generators as a power supply for a body area network , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[3]  A. J. Sprenkels,et al.  The application of silicon dioxide as an electret material , 1988, 6th International Symposium on Electrets,(ISE 6) Proceedings..

[4]  Jan M. Rabaey,et al.  Improving power output for vibration-based energy scavengers , 2005, IEEE Pervasive Computing.

[5]  R. Puers,et al.  Novel design and fabrication of a MEMS electrostatic vibration scavenger , 2004 .