A Mathematical Model for LPCVD in a Single Wafer Reactor
暂无分享,去创建一个
[1] C. F. Curtiss,et al. Molecular Theory Of Gases And Liquids , 1954 .
[2] J. Lumley,et al. A First Course in Turbulence , 1972 .
[3] R. C. Weast. Handbook of chemistry and physics , 1973 .
[4] A. Reisman,et al. Stress Measurements of Thermally Grown Thin Oxides on (100) Si Substrates , 1989 .
[5] S. Patankar. Numerical Heat Transfer and Fluid Flow , 2018, Lecture Notes in Mechanical Engineering.