Selective Digital Etching of Silicon-Germanium using Nitric and Hydrofluoric Acids.
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A. Du | Guilei Wang | Huilong Zhu | H. Radamson | Z. Kong | Junjie Li | Yongkui Zhang | Weixing Huang | K. Jia | Xiaogen Yin | X. Ai | Chen Li | Lu Xie | Yangyang Li | Liheng Zhao | Shishuai Ma | Teng-Wei Yang