Composite Scheduling Method in Semiconductor Wafer Fabrication

A composite scheduling strategy was proposed to cope with the complexity of wafer fabrication,such as the diversity of equipments,multi-products and reenter process flow.The strategy is composed of genetic algorithm and dynamic scheduling rules.First,genetic algorithm is used to optimize the dispatching route of the lots.Then the dynamic scheduling rules decide the dispatching order.Finally,a simulation experiment is presented to illustrate the different effectiveness when the genetic algorithm is mixed with different dynamic scheduling rules.