Deformation behavior of Au/Ti multilayers under indentation

Au/Ti multilayers with individual layer thicknesses of 25 nm and 250 nm were deformed by indentation with a Vickers indenter. The deformation behavior changes from delamination-controlled for the multilayer with an individual layer thickness of 250 nm to shear banding for the multilayer with an individual layer thickness of 25 nm. The length-scale effect on delamination resistance is discussed and it is found that the delamination resistance of the Au/Ti interfaces increases with decreasing layer thickness.

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