The time-resolved two-dimensional profile of a radiofrequency capacitively coupled plasma

The temporal characteristics of 2D spatial images of the net excitation rate of argon in a low-pressure capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by computer-assisted optical emission tomography for pressures ranging from 10 mTorr to 1.0 Torr. The radial uniformity and sustaining mechanism of the CCP are discussed on the basis of the absolute net excitation rate of Ar() in Ar for 13.56 MHz.

[1]  T. Makabe,et al.  Computer‐assisted optical emission tomography in a radiofrequency capacitively coupled plasma , 1996 .

[2]  M. Zachariah,et al.  Two‐dimensional argon metastable density measurements in a radio frequency plasma reactor by planar laser‐induced fluorescence imaging , 1995 .

[3]  T. Makabe,et al.  RADIOFREQUENCY ELECTRON SWARM TRANSPORT IN REACTIVE GASES AND PLASMAS , 1994 .

[4]  D. J. Economou,et al.  Fluid simulations of radio frequency glow discharges: Two‐dimensional argon discharge including metastables , 1993 .

[5]  T. Makabe,et al.  Frequency dependence on the structure of radio frequency glow discharges in Ar , 1993 .

[6]  W. Goedheer,et al.  A two‐dimensional fluid model for an argon rf discharge , 1993 .

[7]  T. Vincent,et al.  Radial optical emission profiles of radio frequency glow discharges , 1993 .

[8]  Robert J. Hoekstra,et al.  Two‐dimensional hybrid model of inductively coupled plasma sources for etching , 1993 .

[9]  M. Lieberman,et al.  Verification of frequency scaling laws for capacitive radio‐frequency discharges using two‐dimensional simulations* , 1993 .

[10]  K. E. Greenberg,et al.  Electron and metastable densities in parallel-plate radio-frequency discharges , 1993 .

[11]  S. Gueron,et al.  A Fast Abel Inversion Algorithm , 1993 .

[12]  Fongray Frank Young,et al.  Radial flow effects in a multidimensional, three‐moment fluid model of radio frequency glow discharges , 1993 .

[13]  T. Makabe,et al.  Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy , 1990 .

[14]  T. Makabe,et al.  Diagnostics of high-frequency discharges in CH4/H2 by time- and space-resolved optical emission spectroscopy , 1990 .

[15]  Kock,et al.  Unified set of atomic transition probabilities for neutral argon. , 1989, Physical review. A, General physics.

[16]  N. Sadeghi,et al.  Radiative lifetimes and collisional energy transfer rate constants in Ar of the Ar(3p55p) and Ar(3p55p′) states , 1982 .