X-ray and photoelectron spectroscopic nondestructive methods for thin films and interfaces study. Application to SrTiO3 based heterostuctures

[1]  B. Govoreanu,et al.  Direct physical evidence of mechanisms of leakage and equivalent oxide thickness reduction in metal-insulator-metal capacitors based on RuOx/TiOx/SrxTiyOz/TiN stacks , 2012 .

[2]  F. Schäfers,et al.  Soft x-ray reflectometry, hard x-ray photoelectron spectroscopy and transmission electron microscopy investigations of the internal structure of TiO2(Ti)/SiO2/Si stacks , 2012, Science and technology of advanced materials.

[3]  A. Shulakov X-ray emission depth-resolved spectroscopy for investigation of nanolayers , 2011 .

[4]  H. Bender,et al.  Impact of bottom electrode and SrxTiyOz film formation on physical and electrical properties of metal-insulator-metal capacitors , 2011 .

[5]  Jae Hyuck Jang,et al.  Atomic Layer Deposition of SrTiO3 Thin Films with Highly Enhanced Growth Rate for Ultrahigh Density Capacitors , 2011 .

[6]  E. P. Savinov,et al.  XPS and depth resolved SXES study of HfO2/Si interlayers , 2010 .

[7]  H. Bender,et al.  Composition influence on the physical and electrical properties of SrxTi1-xOy-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes , 2009 .

[8]  F. Schäfers,et al.  The high kinetic energy photoelectron spectroscopy facility at BESSY progress and first results , 2009 .

[9]  C. Powell,et al.  Surface sensitivity of X-ray photoelectron spectroscopy☆ , 2009 .

[10]  A. Shulakov,et al.  X-ray spectral analysis of the interface of a thin Al2O3 film prepared on silicon by atomic layer deposition , 2004 .

[11]  K. Starke,et al.  Surface X-ray emission from lanthanide metals , 2003 .

[12]  S. Eisebitt,et al.  DEPTH-RESOLVED SOFT X-RAY EMISSION SPECTROSCOPY OF Si-BASED MATERIALS , 2002 .

[13]  D. Attwood Soft X-Rays and Extreme Ultraviolet Radiation , 1999 .

[14]  F. M. Quinn,et al.  SrTiO3(100) step sites as catalytic centers for H2O dissociation , 1987 .

[15]  N. Mott,et al.  A Theory of the Form of the X-Ray Emission Bands of Metals , 1934 .