Surface-finish assessment of synthetic quartz glass

Synthetic quartz glass surfaces have been examined after consecutive stages of the manufacturing process: cutting, flat honing, and polishing. Results are presented of microtopography investigations performed using several optical and non-optical methods such as optical and mechanical profilometry, atomic force microscopy, and integrated light scattering. Rms-roughness values have been determined for each step of the surface finishing process. Subsurface damage effects have been imaged by scanning electron microscopy.