Simultaneous carbon and tungsten thin film deposition using two thermionic vacuum arcs

Abstract Carbon and tungsten films were deposited sequentially and simultaneously from two separate plasmas produced by the thermionic vacuum arc (TVA) method. Total film thickness and atomic concentration of C and W were measured for different substrate positions and arc parameters and a comparison between sequential and simultaneous deposition of carbon and tungsten is presented. For the simultaneous case, while keeping the same discharge parameters as in the sequential case, the carbon composition percentage is enhanced despite the presence of the tungsten plasma. When only the carbon deposition rate is increased 10 times, the tungsten atomic concentration drops to a lower level, while the content of carbon becomes dominant for the substrates positioned near the carbon anode.

[1]  G. Matthews,et al.  Beryllium coatings on metals for marker tiles at JET: development of process and characterization of layers , 2007 .

[2]  K. Bewilogua,et al.  DLC based coatings prepared by reactive d.c. magnetron sputtering , 2004 .

[3]  A. M. Lungu,et al.  Low friction silver-DLC coatings prepared by thermionic vacuum arc method , 2004 .

[4]  H. Pierson.  Handbook of carbon, graphite, diamond, and fullerenes , 1992 .

[5]  R. Kaneko,et al.  Tribological characteristics of highly wear-durable ECR-sputtered carbon film , 2003 .

[6]  E. Szilágyi,et al.  Reactive pulsed laser deposition of hydrogenated carbon thin films: The effect of hydrogen pressure , 2006 .

[7]  R. Brescia,et al.  Low friction properties of nano-structured C-Ni films prepared by thermionic vacuum arc method , 2010 .

[8]  S. Ambler,et al.  THE ELEMENTS , 1998 .

[9]  A. Lamperti,et al.  Systematic study of amorphous hydrogenated and fluorinated carbon films , 2003 .

[10]  R. Neu,et al.  Deuterium inventory in the full-tungsten divertor of ASDEX Upgrade , 2010 .

[11]  W. Milne,et al.  Influence of reactive gas on ion energy distributions in filtered cathodic vacuum arcs , 1997 .

[12]  J. Dicarlo,et al.  Controlling the growth of CVD carbon from methane on transition metal substrates , 2005 .

[13]  R. Tanaka,et al.  Formation of nanostructured Re–Cr–Ni diffusion barrier coatings on Nb superalloys by TVA method , 2005 .

[14]  M. Blideran,et al.  Giant magneto-resistive granular layers deposited by TVA method , 2004 .

[15]  Hugh O. Pierson,et al.  Handbook of carbon, graphite, diamond, and fullerenes : properties, processing, and applications , 1993 .

[16]  Andrew G. Glen,et al.  APPL , 2001 .