Optical interferometric probing of advanced microprocessors

Phase-sensitive signal detection with an integrated interferometer has been applied in backside optical probing to improve waveform quality. We have used the technique on a number of microprocessors on a 0.18 /spl mu/m logic process technology.

[1]  William K. Lo,et al.  Practical optical waveform probing of flip-chip CMOS devices , 1999, International Test Conference 1999. Proceedings (IEEE Cat. No.99CH37034).

[2]  G. Woods,et al.  Optical probing of flip-chip-packaged microprocessors , 2000, 2000 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.00CH37056).

[3]  P.K. Green.  A GHz IA-32 architecture microprocessor implemented on 0.18 /spl mu/m technology with aluminum interconnect , 2000, 2000 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.00CH37056).

[4]  H. K. Heinrich,et al.  Measurement of real-time digital signals in a silicon bipolar junction transistor using a noninvasive optical probe , 1986 .

[5]  Mario Paniccia,et al.  Novel optical probing technique for flip chip packaged microprocessors , 1998, Proceedings International Test Conference 1998 (IEEE Cat. No.98CH36270).