论文信息 - Nanometrology – Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes

Nanometrology – Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes

The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.

[1] Tino Hausotte,et al. Miniature interferometers for applications in microtechnology and nanotechnology , 2003, SPIE Optics + Photonics.

[2] Eberhard Manske,et al. Entwicklung eines Fokussensors und Integration in die Nanopositionier- und Nanomessmaschine (Development of a Focus Sensor and its Integration into the Nanopositioning and Nanomeasuring Machine) , 2004 .

[3] H. Büchner,et al. Interferometrisches Meßverfahren zur berührungslosen und quasi punktförmigen Antastung von Meßoberflächen / Interferometric measuring technique for the contactless and quasi-pointlike scanning of measuring surfaces , 1992 .