Apodized Focusing Fully Etched Subwavelength Grating Couplers

We experimentally demonstrate apodized focusing subwavelength grating couplers for both the fundamental transverse electric (TE<sub>00</sub>) mode and the fundamental transverse magnetic (TM<sub>00</sub>) mode. A measured insertion loss of 3.2 dB with a 1-dB bandwidth of 36 nm has been obtained for the TE<sub>00</sub> mode, and a measured insertion loss of 3.3 dB with a 1-dB bandwidth of 37 nm has been obtained for the TM<sub>00</sub> mode. Back reflections of -24 dB and -21 dB have been obtained for the TE<sub>00</sub> and TM<sub>00</sub> modes, respectively.

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