Atomic force microscope integrated with a scanning electron microscope for tip fabrication

In a new combined atomic force microscope/scanning electron microscope, we have been able to fabricate and test electron‐beam‐deposited tips (e‐beam tips). With this instrument it was possible to test newly grown e‐beam tips within a few minutes of their formation, without ever breaking vacuum. Typical results on oxide‐sharpened conventional tips showed that the radius of curvature could be reduced by a factor of 2.5 with the e‐beam tips.