Design of an integrated 3DoF inner position sensor and 2DoF feedforward control for a 3DoF precision inchworm mechanism

In this paper, we describe a newly proposed design of an integrated three-degrees-of-freedom (3DoF) inner position sensor for an omnidirectional and holonomic inchworm mobile mechanism. The mechanism has two Y-shaped electromagnets and six piezoelectric actuators for obtaining 3DoF inchworm motion on well-polished ferromagnetic surfaces. We calculate conversion equations from four measured distances to X-, Y-, and θ-axis motion. We also explain how to make the input signals to realize the minimum time trajectory of free electromagnets with a newly proposed special kinematic model as an additional condition for energy-efficient control. Details of the design and performance are also described to realize flexible, compact, and high-accuracy positioning in precision engineering.

[1]  Urban Simu,et al.  Analysis of quasi-static and dynamic motion mechanisms for piezoelectric miniature robots , 2006 .

[2]  B.R. Donald,et al.  An untethered, electrostatic, globally controllable MEMS micro-robot , 2006, Journal of Microelectromechanical Systems.

[3]  Tomomasa Sato,et al.  Kinematics of mechanical and adhesional micromanipulation under a scanning electron microscope , 2002 .

[4]  Bradley J. Nelson,et al.  Biological Cell Injection Using an Autonomous MicroRobotic System , 2002, Int. J. Robotics Res..

[5]  T. Sato,et al.  Transient response analysis and FF/FB control with 0.05 micro meter resolution for 3-DOF inchworm mobile mechanism , 2012, 2012 IEEE International Conference on Mechatronics and Automation.

[6]  R Kanzaki,et al.  A dual-channel FM transmitter for acquisition of flight muscle activities from the freely flying hawkmoth, Agrius convolvuli , 2002, Journal of Neuroscience Methods.

[7]  Akira Ito,et al.  Multi-axial micromanipulation organized by versatile micro robots and micro tweezers , 2008, 2008 IEEE International Conference on Robotics and Automation.

[8]  Hirotaka Sato,et al.  Remote Radio Control of Insect Flight , 2009, Frontiers in integrative neuroscience.

[9]  Robert J. Wood,et al.  Towards a 3g crawling robot through the integration of microrobot technologies , 2006, Proceedings 2006 IEEE International Conference on Robotics and Automation, 2006. ICRA 2006..

[10]  O. Fuchiwaki,et al.  Development of 3-DOF Inchworm Mechanism for Flexible, Compact, Low-Inertia, and Omnidirectional Precise Positioning: Dynamical Analysis and Improvement of the Maximum Velocity Within No Slip of Electromagnets , 2012, IEEE/ASME Transactions on Mechatronics.

[11]  Sylvain Martel,et al.  Three-legged wireless miniature robots for mass-scale operations at the sub-atomic scale , 2001, Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164).