High quality mechanical and optical properties of commercial silicon nitride membranes

We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50nm thick, 1mm2 membranes have mechanical Q>106 at 293K, and Q>107 at 300mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293K is less than 2×10−4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.

[1]  T. Kenny,et al.  Attonewton force detection using ultrathin silicon cantilevers , 1997 .

[2]  Signatures for a classical to quantum transition of a driven nonlinear nanomechanical resonator. , 2007, cond-mat/0702255.

[3]  Bishop,et al.  Two-level systems observed in the mechanical properties of single-crystal silicon at low temperatures. , 1987, Physical review letters.

[4]  H. Craighead,et al.  Micro- and nanomechanical sensors for environmental, chemical, and biological detection. , 2007, Lab on a chip.

[5]  B. Chui,et al.  Single spin detection by magnetic resonance force microscopy , 2004, Nature.

[6]  R. Wolffenbuttel,et al.  Optical properties of thin-film silicon-compatible materials. , 1997, Applied optics.

[7]  Andrew G. Glen,et al.  APPL , 2001 .

[8]  C. Fabre,et al.  Squeezing with χ(3) materials , 1992 .

[9]  Robert F. Cook,et al.  Influence of deposition conditions on mechanical properties of low-pressure chemical vapor deposited low-stress silicon nitride films , 2003 .

[10]  SCHEME TO PROBE THE DECOHERENCE OF A MACROSCOPIC OBJECT , 1997, quant-ph/9712017.

[11]  Scott S. Verbridge,et al.  A megahertz nanomechanical resonator with room temperature quality factor over a million , 2008 .

[12]  D. Rugar,et al.  Improved fiber‐optic interferometer for atomic force microscopy , 1989 .

[13]  H. Philipp.  Optical Properties of Silicon Nitride , 1973 .

[14]  Christoph Simon,et al.  Towards quantum superpositions of a mirror , 2004 .

[15]  Aires Ferreira,et al.  Optomechanical entanglement between a movable mirror and a cavity field , 2007, 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference.

[16]  A. Norris,et al.  Thermoelastic relaxation in elastic structures, with applications to thin plates , 2004, cond-mat/0405323.

[17]  M. D. LaHaye,et al.  Cooling a nanomechanical resonator with quantum back-action , 2006, Nature.

[18]  Brian H. Houston,et al.  A loss mechanism study of a very high Q silicon micromechanical oscillator , 2005 .

[19]  S. Girvin,et al.  Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane , 2007, Nature.

[20]  C. Zener.  INTERNAL FRICTION IN SOLIDS. I. THEORY OF INTERNAL FRICTION IN REEDS , 1937 .

[21]  T. Kenny.  Nanometer-scale force sensing with MEMS devices , 2001, IEEE Sensors Journal.