Application of twisting algorithm to a 2D electrostatic MEMS micromirror

In this paper, a second-order sliding mode control (2-SMC) scheme, called twisting algorithm, is applied to control an electrostatically actuated 2D torsional MEMS micromirror. The proposed twisting algorithm is able to improve the transient and positioning performance of the controlled 2D micromirror including robustness against model uncertainties and external disturbances. The main advantages of the proposed scheme over the first-order SMCare chattering attenuation and enhanced positional accuracy. The closed-loop stability and higher performance of the micromirror under closed-loop control is verified though numerical simulations and experiments.

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