论文信息 - Deposition of HfO2, Gd2O3 and PrOx by Liquid Injection ALD Techniques† - 字舞流文

Deposition of HfO2, Gd2O3 and PrOx by Liquid Injection ALD Techniques†

Y. F. Loo | R. Potter | H. C. Aspinall | A. C. Jones | G. Critchlow | T. Manning | P. Chalker | M. Schumacher | L. Smith