论文信息 - Sputter deposition of PZT piezoelectric films on thin glass substrates for adjustable x-ray optics. - 字舞流文

Sputter deposition of PZT piezoelectric films on thin glass substrates for adjustable x-ray optics.

S. Trolier-McKinstry | R. Johnson-Wilke | P. Reid | V. Cotroneo | R. Wilke | W. Davis | D. Schwartz