A Review of the Reliability of Integrated IR Laser Diodes for Silicon Photonics

With this review paper we provide an overview of the main degradation mechanisms that limit the long-term reliability of IR semiconductor lasers for silicon photonics applications. The discussion is focused on two types of laser diodes: heterogeneous III–V lasers bonded onto silicon-on-insulator wafers, and InAs quantum-dot lasers epitaxially grown on silicon. A comprehensive analysis of the reliability-oriented literature published to date reveals that state-of-the-art heterogeneous laser sources share with conventional laser diodes their major epitaxy-related degradation processes, such as the generation of non-radiative recombination centers or dopant diffusion, while eliminating cleaved facets and exposed mirrors. The lifetime of InAs quantum dot lasers grown on silicon, whose development represents a fundamental step toward a fully epitaxial integration of future photonic integrated circuits, is strongly limited by the density of extended defects, mainly misfit dislocations, protruding into the active layer of the devices. The concentration of such defects, along with inefficient carrier injection and excessive carrier overflow rates, promote recombination-enhanced degradation mechanisms that reduce the long-term reliability of these sources. The impact of these misfits can be largely eliminated with the inclusion of blocking layers.

[1]  John E. Bowers,et al.  Perspective on the future of silicon photonics and electronics , 2021 .

[2]  J. Bowers,et al.  Reduced dislocation growth leads to long lifetime InAs quantum dot lasers on silicon at high temperatures , 2021 .

[3]  J. Bowers,et al.  Identification of dislocation-related and point-defects in III-As layers for silicon photonics applications , 2021, Journal of Physics D: Applied Physics.

[4]  J. Bowers,et al.  High-temperature reliable quantum-dot lasers on Si with misfit and threading dislocation filters , 2021 .

[5]  J. Bowers,et al.  Degradation of 1.3 μm InAs Quantum-Dot Laser Diodes: Impact of Dislocation Density and Number of Quantum Dot Layers , 2021, IEEE Journal of Quantum Electronics.

[6]  Huiyun Liu,et al.  Heteroepitaxial Growth of III-V Semiconductors on Silicon , 2020 .

[7]  T. Wunderer,et al.  The 2020 UV emitter roadmap , 2020, Journal of Physics D: Applied Physics.

[8]  F. Cappelluti,et al.  Impact of carrier transport on the performance of QD lasers on silicon: a drift-diffusion approach , 2020 .

[9]  Alan Y. Liu,et al.  Recombination-enhanced dislocation climb in InAs quantum dot lasers on silicon , 2020 .

[10]  J. Bowers,et al.  Defect filtering for thermal expansion induced dislocations in III–V lasers on silicon , 2020, Applied Physics Letters.

[11]  J. Bowers,et al.  Investigation of Current-Driven Degradation of 1.3 μm Quantum-Dot Lasers Epitaxially Grown on Silicon , 2020, IEEE Journal of Selected Topics in Quantum Electronics.

[12]  John E. Bowers,et al.  Non-radiative recombination at dislocations in InAs quantum dots grown on silicon , 2019, Applied Physics Letters.

[13]  Zeyu Zhang,et al.  The Importance of p-Doping for Quantum Dot Laser on Silicon Performance , 2019, IEEE Journal of Quantum Electronics.

[14]  J. Bowers,et al.  Improving Reliability of InAs Quantum Dot Lasers on Silicon Substrates , 2019, 2019 IEEE Photonics Conference (IPC).

[15]  K. Lau 4‐1: Invited Paper: Micro‐LED displays: can the monolithic approach produce full‐color? , 2019, SID Symposium Digest of Technical Papers.

[16]  Gaudenzio Meneghesso,et al.  Physical Origin of the Optical Degradation of InAs Quantum Dot Lasers , 2019, IEEE Journal of Quantum Electronics.

[17]  Richard Jones,et al.  Heterogeneously Integrated InP\/Silicon Photonics: Fabricating Fully Functional Transceivers , 2019, IEEE Nanotechnology Magazine.

[18]  Zeyu Zhang,et al.  A Review of High-Performance Quantum Dot Lasers on Silicon , 2019, IEEE Journal of Quantum Electronics.

[19]  Gaudenzio Meneghesso,et al.  Degradation mechanisms of heterogeneous III-V/Silicon loop-mirror laser diodes for photonic integrated circuits , 2018, Microelectron. Reliab..

[20]  J. Bowers,et al.  Integrated heterogeneous silicon/III–V mode-locked lasers , 2018 .

[21]  John E. Bowers,et al.  Impact of threading dislocation density on the lifetime of InAs quantum dot lasers on Si , 2018 .

[22]  Wenliang Wang,et al.  High-Performance GaN-Based LEDs on Si Substrates: The Utility of Ex Situ Low-Temperature AlN Template With Optimal Thickness , 2017, IEEE Transactions on Electron Devices.

[23]  Alexey E. Zhukov,et al.  Effect of modulation p-doping level on multi-state lasing in InAs/InGaAs quantum dot lasers having different external loss , 2017 .

[24]  John E. Bowers,et al.  Heterogeneous Silicon/III–V Semiconductor Optical Amplifiers , 2016, IEEE Journal of Selected Topics in Quantum Electronics.

[25]  Yasuhiko Arakawa,et al.  Quantum dot lasers for silicon photonics , 2016, 2016 21st OptoElectronics and Communications Conference (OECC) held jointly with 2016 International Conference on Photonics in Switching (PS).

[26]  Alan Y. Liu,et al.  Heterogeneous Silicon Photonic Integrated Circuits , 2016, Journal of Lightwave Technology.

[27]  John E. Bowers,et al.  Quantum dot lasers for silicon photonics [Invited] , 2015 .

[28]  John E. Bowers,et al.  Reliability of InAs/GaAs Quantum Dot Lasers Epitaxially Grown on Silicon , 2015, IEEE Journal of Selected Topics in Quantum Electronics.

[29]  John E. Bowers,et al.  High performance continuous wave 1.3 μm quantum dot lasers on silicon , 2014 .

[30]  P. Pintus,et al.  Characterization of Insertion Loss and Back Reflection in Passive Hybrid Silicon Tapers , 2013, IEEE Photonics Journal.

[31]  Di Liang,et al.  Reliability of Hybrid Silicon Distributed Feedback Lasers , 2013, IEEE Journal of Selected Topics in Quantum Electronics.

[32]  Rachel Won,et al.  Integrating silicon photonics , 2010 .

[33]  J. Bowers,et al.  Demonstration of Enhanced III-V-On-Silicon Hybrid Integration by Using a Strained Superlattice as a Defect Blocking Layer , 2010 .

[34]  Di Liang,et al.  Hybrid Silicon Lasers: The Final Frontier to Integrated Computing , 2010 .

[35]  Di Liang,et al.  Hybrid Integrated Platforms for Silicon Photonics , 2010, Materials.

[36]  Di Liang,et al.  Low-Temperature, Strong SiO2-SiO2 Covalent Wafer Bonding for III–V Compound Semiconductors-to-Silicon Photonic Integrated Circuits , 2008 .

[37]  Joon Seop Kwak,et al.  Characteristics of GaN-based laser diodes for post-DVD applications , 2004 .

[38]  D. B. Nikitin,et al.  Reliability of carbon doped MOCVD grown InGaAs/AlGaAs high power laser diodes , 2003, Proceedings of CAOL'2003. 1st International Conference on Advanced Optoelectronics and Lasers. Jontly with 1st Workshop on Precision Oscillations in Electronics and Optics (IEEE Cat. No.03EX715).

[39]  Klas Hjort,et al.  Plasma-assisted InP-to-Si low temperature wafer bonding , 2002 .

[40]  John E. Bowers,et al.  Improved luminescence from InGaAsP/InP MQW active regions using a wafer fused superlattice barrier , 1999, Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362).

[41]  L. Coldren,et al.  Diode Lasers and Photonic Integrated Circuits , 1995 .

[42]  John H. Marsh,et al.  A comparison of carbon and zinc doping in GaAs/AlGaAs lasers bandgap-tuned by impurity-free vacancy disordering , 1994 .

[43]  T. Főrster,et al.  Laser operation‐induced migration of beryllium at mirrors of GaAs/AlGaAs laser diodes , 1993 .

[44]  Yoshio Itoh,et al.  Room‐temperature operation of an InGaAsP double‐heterostructure laser emitting at 1.55 μm on a Si substrate , 1990 .

[45]  Meng-En Lee,et al.  Heteroepitaxial growth of InP directly on Si by low pressure metalorganic chemical vapor deposition , 1987 .

[46]  Mitsuo Fukuda,et al.  Degradation of active region in InGaAsP/InP buried heterostructure lasers , 1985 .

[47]  Lionel C. Kimerling,et al.  Recombination enhanced defect reactions , 1978 .

[48]  P. Petroff,et al.  Defect structure introduced during operation of heterojunction GaAs lasers , 1973 .