In situ measurement of Young's modulus of carbon nanotubes inside a TEM through a hybrid nanorobotic manipulation system

A hybrid nanorobotic manipulation system inside a scanning electron microscope (SEM) and a transmission electron microscope (TEM) is presented. The SEM manipulators have been constructed with 8 degrees of freedom (DOFs) with three units for effective TEM sample preparation. The TEM manipulator consists of a 3-DOF manipulator actuated with four multilayer piezoelectric actuators and a 3-DOF passively driven sample stage. High resolution and transmission image of TEM is readily used for measurement and evaluation of samples. The stage is premanipulated by the SEM manipulator for sample preparations inside the SEM. This methodology is called the hybrid nanorobotic manipulation so as to differentiate it from those with only an exchangeable specimen holder. To show the effectiveness of the system, the Young's modulus of a carbon nanotube (CNT) was measured to be 1.23 TPa inside a TEM after being premanipulated inside the SEM. With this system, we can measure the inner diameter of a CNT and improve the accuracy in measuring the Young's modulus of a CNT.

[1]  Z. Wang,et al.  Measuring the Young's modulus of solid nanowires by in situ TEM (Eighth Conference on Frontiers of Electron Microscopy in Materials Science) , 2002 .

[2]  Fumihito Arai,et al.  Calibration of Carbon Nanotube Probes for Pico-Newton Order Force Measurement Inside a Scanning Electron Microscope , 2004, J. Robotics Mechatronics.

[3]  Fumihito Arai,et al.  Hybrid nanorobotic manipulation system inside scanning electron microscope and transmission electron microscope , 2004, 2004 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS) (IEEE Cat. No.04CH37566).

[4]  Masato Tomita,et al.  Growth and structure of graphitic tubules and polyhedral particles in arc-discharge , 1993 .

[5]  Zettl,et al.  Low-friction nanoscale linear bearing realized from multiwall carbon nanotubes , 2000, Science.

[6]  Charles M. Lieber,et al.  Nanobeam Mechanics: Elasticity, Strength, and Toughness of Nanorods and Nanotubes , 1997 .

[7]  Fumihito Arai,et al.  DESTRUCTIVE CONSTRUCTION OF NANOSTRUCTURES WITH CARBON NANOTUBES , 2002 .

[8]  Richard Martel,et al.  Manipulation of Individual Carbon Nanotubes and Their Interaction with Surfaces , 1998 .

[9]  D. Eigler,et al.  Positioning single atoms with a scanning tunnelling microscope , 1990, Nature.

[10]  Fumihito Arai,et al.  Assembly of nanodevices with carbon nanotubes through nanorobotic manipulations , 2003, Proc. IEEE.

[11]  F. Arai,et al.  A hybrid nanorobotic manipulation system integrated with nanorobotic manipulators inside scanning and transmission electron microscopes , 2004, 4th IEEE Conference on Nanotechnology, 2004..

[12]  Theodore V. Galambos,et al.  Guide to stability design criteria for metal structures , 1998 .

[13]  Jian Ping Lu.  Elastic Properties of Carbon Nanotubes and Nanoropes , 1997 .

[14]  Nobuo Tanaka,et al.  Cross-sectional time-resolved high-resolution transmission electron microscopy of atomic-scale contact and noncontact-type scannings on gold surfaces , 1997 .

[15]  Fumihito Arai,et al.  Electron-beam-induced deposition with carbon nanotube emitters , 2002 .