Influence of metal films on the optical scatter and related microstructure of coated surfaces.

Deposition of 0.1–1.0-μm thick metal on a CaF2 coated Si wafer causes a reduction in optical scatter and related microroughness. This effect is not observed when the coated surfaces are examined using a surface profilometer (Talystep). Scanning electron micrographs indicate that coated surfaces are smoother than uncoated surfaces.