Fabrication of Phase Only Binary Blazed Grating with Subwavelength Structures Designed by Deterministic Method Based on Electromagnetic Analysis

A binary blazed grating with subwavelength structures for multilevel phase modulation can be designed by our previously proposed deterministic method based on electromagnetic analysis without any iterative optimization. On the other hand, this design method does not focus on the influence of the fabrication process, however, the fabrication of different neighbor binary subwavelength microstructures under a uniform condition has the potential to cause various defects. In this study, we investigate the influence of defects due to the fabrication process by fabricating a binary blazed grating with subwavelength structures designed using the design method. The decrease in the diffraction efficiency of the fabricated binary blazed grating with subwavelength structures is less than several percent and is within the allowable range.

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